Rotary Metal Sputtering Targets

Price:

Excellent properties such as high purity, high density, high thermal conductivity, high stability, uniform grain, etc.
High purity: The metal target requires very high purity, to ensure the stability and reliability of the material.We have various purity levels to suit your specific requirements, with the minimum purity of 99.5% up to 99.9999% for some metals. Also have controlled specific impurities within the target
High density: Metal targets have high density characteristics, usually up to 99%, to ensure the stability and quality of materials.
Uniform grain: Controlled grain size and direction
Good composition uniformity: the component distribution is uniform, ensure the film formation rate is uniform, film quality.

Manufacturing processes
Manufacturing processes depend on the properties of the target material and its application.
We have (Vacuum melting, Rolling, Vacuum spraying, Atmospheric spraying, Vacuum hot pressing, Hot Isostatic Pressing (HIP), Cold Isostatic Pressing +Various atmosphere sintering technology, Low temperature metal, Vacuum hot pressing sintering technology, Electron beam melting, Zone melting purification, Vacuum directional solidification technology, etc).

For metal and alloy target, we adopt Vacuum melting, Rolling, Low temperature metal,Vacuum hot pressing sintering, Electron beam melting, Zone melting purification, Vacuum directional solidification technology.

Both Planar and Rotary target available
Planar target
Planar targets mainly refer to circular targets and rectangular targets with certain thickness. The plane target material is connected with sputtering equipment by means of thread, the sputtering film layer is attached to the substrate under vacuum conditions, and then the film is processed by various methods to meet different needs.

Rotary target
Rotary target is a magnetically controlled target. The target is shaped like a cylinder containing a stationary magnet for rotation. Its advantage is high utilization rate, the disadvantage is high cost.

Reference size
* Maximum sizes of planar target
   Thickness: 30mm (can be 60mm for round target)
   Width: max 2000mm
   Length: max 4000mm

* Maximum sizes of rotary target
   Vacuum/Air Spraying
   Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm
   Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm
   Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm
   Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

Bonding
Backing tubes: ID125 x OD133 x Length500~4000mm, Thickness: 8~13mm
* Maximum sizes of planar target
   Thickness: 30mm (can be 60mm for round target)
   Width: max 2000mm
   Length: max 4000mm

* Maximum sizes of rotary target
   Vacuum/Air Spraying
   Backing tubes: ID56 x OD64 x Length300~3000mm, Thickness: 3~5mm
   Backing tubes: ID78~83 x OD89~92 x Length300~3000mm, Thickness: 3~7mm
   Backing tubes: ID100 x OD108 x Length300~3000mm, Thickness: 3~8mm
   Backing tubes: ID125 x OD133 x Length300~4000mm, Thickness: 3~13mm

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